Substrate processing apparatus, substrate processing method and non-transitory computer-readable recording medium therefor

ABSTRACT

Described herein is a technique capable of suppressing generation of particles by removing by-products in a groove of a high aspect ratio. According to one aspect of the technique, there is provided a substrate processing apparatus including: a process chamber in which a substrate is processed; and a substrate support provided in the process chamber and including a plurality of supports where the substrate is placed, wherein the process chamber includes a process region where a process gas is supplied to the substrate and a purge region where the process gas above the substrate is purged, and the purge region includes a first pressure purge region to be purged at a first pressure and a second pressure purge region to be purged at a second pressure higher than the first pressure.

CROSS REFERENCE TO RELATED APPLICATIONS

This patent application is a continuation of U.S. patent application Ser. No. 17/012,875 filed on Sep. 4, 2020 and claims foreign priority under 35 U.S.C. § 119(a)-(d) to Japanese Patent Application No. JP 2020-054334, filed on Mar. 25, 2020, the entire contents of which are hereby incorporated by reference.

TECHNICAL FIELD

The present disclosure relates to a substrate processing apparatus.

BACKGROUND

As an apparatus of processing a semiconductor substrate, a rotary type apparatus may be used. For example, according to the rotary type apparatus, a plurality of substrates are arranged on a substrate mounting table of the rotary type apparatus along a circumferential direction, and various gases are supplied onto the plurality of the substrates by rotating the substrate mounting table. In addition, a vertical type apparatus may also be used. For example, according to the vertical type apparatus, a source gas is supplied onto a plurality of substrates stacked in the vertical type apparatus by using a source gas nozzle extending along a stacking direction of the plurality of the substrates stacked in the vertical type apparatus.

As a three-dimensional structure is used as a structure of a semiconductor device, a film-forming process with a good coverage has to be performed to a groove of a high aspect ratio. According to the rotary type apparatus, a process chamber is divided into a plurality of process regions, and each process of the film-forming process is performed in each process region. Therefore, by-products generated by a film-forming gas have to be removed from an inside of the groove.

SUMMARY

Described herein is a technique capable of suppressing generation of particles by removing by-products in a groove of a high aspect ratio.

According to one aspect of the technique of the present disclosure, there is provided a substrate processing apparatus including: a process vessel in which a substrate is processed; and a substrate support provided in the process vessel and a plurality of supports where the substrate is placed, wherein the process vessel includes a process region where a process gas is supplied to the substrate and a purge region where the process gas above the substrate is purged, and a ceiling of the purge region is located below a ceiling of the process region, wherein the purge region includes a first region to which a first exhaust pump is connected and whose inner atmosphere is exhausted at a first pressure and a second region to which a second exhaust pump is connected and whose inner atmosphere is exhausted at a second pressure, and wherein the ceiling of the purge region includes a first ceiling portion provided at the first region to face the substrate support and a second ceiling portion provided at the second region to be adjacent to the first ceiling portion.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 schematically illustrates a horizontal cross-section of a reactor of a substrate processing apparatus according to one or more embodiment described herein.

FIG. 2 schematically illustrates a vertical cross-section taken along the line A-A′ of the reactor of the substrate processing apparatus according to the embodiments shown in FIG. 1 .

FIG. 3 schematically illustrates a substrate support mechanism according to the embodiments described herein.

FIG. 4A schematically illustrates a source gas supplier according to the embodiments described herein, FIG. 4B schematically illustrates a reactive gas supplier according to the embodiments described herein and FIG. 4C schematically illustrates an inert gas supplier according to the embodiments described herein.

FIG. 5 schematically illustrates a vertical cross-section taken along the line B-B′ of the reactor of the substrate processing apparatus according to the embodiments shown in FIG. 1 .

FIG. 6 is a block diagram schematically illustrating a configuration of a controller and related components of the substrate processing apparatus according to the embodiments described herein.

FIG. 7 is a flow chart schematically illustrating a substrate processing according to the embodiments described herein.

FIG. 8 is a flow chart schematically illustrating a film-forming step of the substrate processing according to the embodiments described herein.

FIG. 9 schematically illustrates a modified example of a vertical cross-section taken along the line B-B′ of the reactor of the substrate processing apparatus according to the embodiments shown in FIG. 1 .

FIG. 10 schematically illustrates another modified example of a vertical cross-section taken along the line B-B′ of the reactor of the substrate processing apparatus according to the embodiments shown in FIG. 1 .

DETAILED DESCRIPTION

Hereinafter, one or more embodiments (also simply referred to as “embodiments”) according to the technique of the present disclosure will be described with reference to the drawings.

(1) CONFIGURATION OF SUBSTRATE PROCESSING APPARATUS

As shown in FIGS. 1 and 2 , a reactor 200 of a substrate processing apparatus (also referred to a “rotary type apparatus” or a “rotary type substrate processing apparatus”) includes a process vessel 203 which is a cylindrical sealed vessel (hermetic vessel). For example, the process vessel 203 is made of a material such as stainless steel (SUS) and an aluminum alloy. A process chamber 201 in which a plurality of substrates (also simply referred to as “substrates”) including a substrate S are processed is provided in the process vessel 203. A gate valve 205 is connected to the process vessel 203. The substrate S may be loaded (transferred) into or unloaded (transferred) out of the process vessel 203 through the gate valve 205.

The process chamber 201 includes a process region 206 to which a process gas such as a source gas and a reactive gas is supplied and a purge region 207 to which a purge gas is supplied. That is, the process gas is supplied to the substrate S in the process region 206, and the purge gas is supplied to the substrate S in the purge region 207. According to the embodiments, the process region 206 and the purge region 207 are alternately arranged along a circumferential direction of the process chamber 201. For example, a first process region 206 a, a first purge region 207 a, a second process region 206 b and a second purge region 207 b are arranged along the circumferential direction in this order. As described later, for example, the source gas is supplied into the first process region 206 a, the reactive gas is supplied into the second process region 206 b, and an inert gas serving as the purge gas is supplied into the first purge region 207 a and the second purge region 207 b. As a result, a predetermined processing (substrate processing) is performed to the substrate S in accordance with the gas supplied into each region.

The purge region 207 a and the purge region 207 b are configured to spatially separate the first process region 206 a and the second process region 206 b. As described later in detail, ceilings 208 of the purge region 207 a and the purge region 207 b are disposed lower than a ceiling of the process region 206 (that is, a lower surface of the top plate 209). Ceilings 208 a and 208 b are provided in the purge regions 207 a and 207 b, respectively, at positions facing a rotary table 217 serving as a substrate support. By purging spaces defined by the ceilings 208 a and 208 b and the rotary table 217, it is possible to remove excess gases on the substrate S. By purging spaces defined by the ceilings 208 a and 208 b and the rotary table 217, it is also possible to partition the adjacent process region 206 (that is, the first process region 206 a and the second process region 206 b).

The rotary table 217 configured to be rotatable is provided at a center portion of the process vessel 203. A rotating shaft of the rotary table 217 is provided at a center of the process vessel 203. For example, the rotary table 217 is made of a material such as quartz, carbon and silicon carbide (SiC) such that the substrate S is not affected by the metal contamination.

The rotary table 217 is configured such that the plurality of the substrates (for example, five substrates) including the substrate S can be arranged within the process vessel 203 on the same plane and along the same circumference along a rotational direction “R”. In the present specification, the term “the same plane” is not limited to a perfectly identical plane but may also include a case where, for example, the plurality of the substrates including the substrate S are arranged so as not to overlap with each other when viewed from above.

A plurality of concave portions (also simply referred to as “concave portions”) 217 b serving as a part of substrate mounting table (that is, the rotary table 217) are provided on a surface of the rotary table 217 to support the plurality of the substrates including the substrate S. The concave portions 217 b may also referred to as supports 217 b. The number of the concave portions 217 b is equal to the number of the substrates to be processed. For example, the plurality of the concave portions 217 b are arranged at the same distance from a center of the rotary table 217, and are arranged along the same circumference at equal intervals (for example, 72° intervals). In FIG. 1 , the illustration of the plurality of the concave portions 217 b is omitted for simplification.

Each of the concave portions 217 b is of a circular shape when viewed from above and of a concave shape when viewed by a vertical cross-section thereof. It is preferable that a diameter of each of the concave portions 217 b is slightly greater than a diameter of the substrate S. A plurality of substrate placing surfaces are provided respectively at the bottoms of the plurality of the concave portions 217 b, respectively. For example, the substrate S may be placed on the substrate placing surface by being placed on one of the concave portions 217 b. Through-holes 217 a penetrated by pins 219 described later are provided at each of the substrate placing surfaces of the concave portions 217 b.

A substrate support mechanism 218 shown in FIG. 3 is provided in the process vessel 203 at a position below the rotary table 217 and facing the gate valve 205. The substrate support mechanism 218 includes the pins 219 configured to elevate or lower the substrate S and to support a back surface of the substrate S when the substrate S is loaded into or unloaded out of the process chamber 201. The pins 219 may be of an extendable configuration. For example, the pins 219 may be accommodated in a main body of the substrate support mechanism 218. When the substrate S is transferred, the pins 219 are extended and pass through the through-holes 217 a. Thereby, the substrate S is supported by the pins 219. Thereafter, by moving front ends of the pins 219 downward, the substrate S is placed on one of the concave portions 217 b. For example, the substrate support mechanism 218 is fixed to the process vessel 203. The substrate support mechanism 218 may be embodied by any configuration as long as the pins 219 can be inserted into the through-holes 217 a when the substrate S is placed, and may also be fixed to an inner peripheral convex portion 282 or an outer peripheral convex portion 283 described later.

The rotary table 217 is fixed to a core portion 221. The core portion 221 is provided at the center of the rotary table 217 and configured to fix the rotary table 217. Since the core portion 221 supports the rotary table 217, for example, the core portion 221 is made of a metal that can withstand the weight of the rotary table 217. A shaft 222 is provided below the core portion 221. The shaft 222 supports the core portion 221.

A lower portion of the shaft 222 penetrates a hole 223 provided at a bottom of the process vessel 203, and a vessel 204 capable of hermetically sealing the shaft 222 covers a periphery of the lower portion of the shaft 222. The vessel 204 is provided outside the process vessel 203. A lower end of the shaft 222 is connected to a rotator (also referred to as a “rotating part” or a “rotating mechanism”) 224. The rotator 224 is provided with components such as a rotating shaft (not shown) and a motor (not shown), and is configured to rotate the rotary table 217 according to an instruction from a controller 300 described later. That is, the controller 300 controls the rotator 224 to rotate the rotary table 217 about a point (for example, about the center of the core portion 221) provided outside the substrate S, so that the substrate S sequentially passes through the first process region 206 a, the first purge region 207 a, the second process region 206 b and the second purge region 207 b in this order.

A quartz cover 225 is provided so as to cover the core portion 221. That is, the quartz cover 225 is provided between the core portion 221 and the process chamber 201. The quartz cover 225 is configured to cover the core portion 221 via a space between the core portion 221 and the process chamber 201. For example, the quartz cover 225 is made of a material such as quartz and SiC such that the substrate S is not affected by the metal contamination. The core portion 221, the shaft 222, the rotator 224 and the quartz cover 225 may be collectively referred to as a “support”.

A heater mechanism 281 is provided below the rotary table 217. A plurality of heaters including a heater 280 serving as a heating device are embedded in the heater mechanism 281. The plurality of heaters including the heater 280 are configured to heat the plurality of the substrate including the substrate S placed on the rotary table 217, respectively. The plurality of the heaters including the heater 280 are arranged along the same circumference in accordance with a shape of the process vessel 203.

The heater mechanism 281 is constituted mainly by: the inner peripheral convex portion 282 provided on the bottom of the process vessel 203 and on the center portion of the process vessel 203; the outer peripheral convex portion 283 disposed outside the heater 280; and the heater 280. The inner peripheral convex portion 282, the heater 280 and the outer peripheral convex portion 283 are arranged concentrically. A space 284 is provided between the inner peripheral convex portion 282 and the outer peripheral convex portion 283. The heater 280 is disposed in the space 284. Since the inner peripheral convex portion 282 and the outer peripheral convex portion 283 are fixed to the process vessel 203, the inner peripheral convex portion 282 and the outer peripheral convex portion 283 may be considered as a part of the process vessel 203.

While the embodiments will be described by way of an example in which the heater 280 of a circular shape is used, the embodiments are not limited thereto as long as the substrate S can be heated by the heater 280. For example, the heater 280 may be divided into a plurality of auxiliary heater structures. For example, the heater 280 may be embedded in the rotary table 217.

A flange 282 a is provided at an upper portion of the inner peripheral convex portion 282 to face the heater 280. A window 285 is supported on upper surfaces of the flange 282 a and the outer peripheral convex portion 283. For example, the window 285 is made of a material capable of transmitting the heat generated by the heater 280 such as quartz. The window 285 is fixed by interposing the window 285 between the inner peripheral convex portion 282 and an upper portion 286 a of an exhaust structure 286 described later.

A heater temperature controller 287 is connected to the heater 280. The heater temperature controller 287 is electrically connected to the controller 300 described later, and is configured to control the supply of the electric power to the heater 280 according to an instruction from the controller 300 to perform a temperature control.

An inert gas supply pipe 275 communicating with the space 284 is provided at the bottom of the process vessel 203. The inert gas supply pipe 275 is connected to an inert gas supplier (which is an inert gas supply system) 270 described later. The inert gas supplied through the inert gas supplier 270 is supplied to the space 284 through the inert gas supply pipe 275. By setting the space 284 to an inert gas atmosphere, it is possible to prevent the process gas from entering the space 284 through a gap in the vicinity of the window 285.

The exhaust structure 286 made of a metal is disposed (provided) between an outer peripheral surface of the outer peripheral convex portion 283 and an inner peripheral surface of the process vessel 203. The exhaust structure 286 includes an exhaust groove 288 and an exhaust buffer space 289. Each of the exhaust groove 288 and the exhaust buffer space 289 is of a ring shape in accordance with the shape of the process vessel 203.

A portion of the exhaust structure 286 which is not in contact with the outer peripheral convex portion 283 is referred to as the upper portion 286 a. As described above, the upper portion 286 a is configured to fix the window 285 together with the inner peripheral convex portion 282.

According to the rotary type substrate processing apparatus as in the embodiments, it is preferable that a height of the substrate S is same as or close to a height of an exhaust port described later. When the height of the exhaust port is lower than that of the substrate S, a turbulent flow of the gas may occur at an end portion of the rotary table 217. On the other hand, it is possible to suppress the occurrence of the turbulent flow at an edge of the substrate S near the exhaust port by setting the height of the substrate S to be the same as or close to the height of an exhaust port.

According to the embodiments, an upper end of the exhaust structure 286 is provided at the same height as the rotary table 217. When the upper end of the exhaust structure 286 is provided at the same height as the rotary table 217, as shown in FIG. 2 , a protrusion of the upper portion 286 a protrudes from the window 285. To prevent the particles from diffusing, a quartz cover 290 is provided to cover the protrusion of the upper portion 286 a. Without the quartz cover 290, the gas may come into contact with the upper portion 286 a, corrode the upper portion 286 a and generate the particles in the process chamber 201. A space 299 is provided between the quartz cover 290 and the upper portion 286 a.

An exhaust port 291 and an exhaust port 292 are provided at a bottom of the exhaust structure 286. The exhaust port 291 and an exhaust port 292 serve as an exhauster (which is an exhaust mechanism). The source gas supplied into the first process region 206 a is mainly exhausted through the exhaust port 291. The reactive gas supplied into the second process region 206 b is mainly exhausted through the exhaust port 292. Each of the gases describe above is exhausted through the exhaust port 291 and the exhaust port 292 via the exhaust groove 288 and the exhaust buffer space 289.

Subsequently, a source gas supplier (also referred to as a “source gas supply part” or a “source gas supply system”) 240 will be described with reference to FIGS. 1 and 4A. As shown in FIG. 1 , a nozzle 245 extending toward the center of the process vessel 203 penetrates a side of the process vessel 203. The nozzle 245 is provided in the first process region 206 a. For example, a downstream end of a gas supply pipe 241 is connected to the nozzle 245.

A source gas supply source 242, a mass flow controller (MFC) 243 serving as a flow rate controller (also referred to as a “flow rate control mechanism”) and a valve 244 serving as an opening/closing valve are provided at the gas supply pipe 241 in the sequential order from an upstream side to a downstream side of the gas supply pipe 241.

The source gas is supplied into the first process region 206 a through the nozzle 245 via the gas supply pipe 241 provided with the MFC 243 and the valve 244.

In the present specification, the source gas is one of process gases, and serves as a source when a film is formed. The source gas contains at least one element constituting the film. For example, the source gas contains at least one element among silicon (Si), titanium (Ti), tantalum (Ta), hafnium (Hf), zirconium (Zr), ruthenium (Ru), nickel (Ni), tungsten (W) and molybdenum (Mo).

Specifically, according to the embodiments, for example, dichlorosilane (Si2H2Cl2) gas may be used as the source gas. When a source of the source gas is a gaseous state under the normal temperature (room temperature), a gas mass flow controller is used as the MFC 243.

The source gas supplier (also referred to as a “first gas supply system” or a “first gas supply part”) 240 is constituted mainly by the gas supply pipe 241, the MFC 243, the valve 244 and the nozzle 245. The source gas supplier 240 may further include the source gas supply source 242.

Subsequently, a reactive gas supplier (also referred to as a “reactive gas supply part” or a “reactive gas supply system”) 250 will be described with reference to FIGS. 1 and 4B. As shown in FIG. 1 , a nozzle 255 extending toward the center of the process vessel 203 penetrates a side of the process vessel 203. The nozzle 255 is provided in the second process region 206 b.

A gas supply pipe 251 is connected to the nozzle 255. A reactive gas supply source 252, an MFC 253 and a valve 254 are provided at the gas supply pipe 251 in the sequential order from an upstream side to a downstream side of the gas supply pipe 251.

The reactive gas is supplied into the second process region 206 b through the nozzle 255 via the gas supply pipe 251 provided with the MFC 253 and the valve 254.

In the present specification, the reactive gas is one of the process gases, and refers to a gas that reacts with a first layer formed on the substrate S by supplying the source gas. For example, the reactive gas may include at least one among ammonia (NH3) gas, nitrogen (N2) gas, hydrogen (H2) gas and oxygen (O2) gas. Specifically, according to the embodiments, for example, the NH3 gas may be used as the reactive gas.

The reactive gas supplier (also referred to as a “second gas supply system” or a “second gas supply part”) 250 is constituted mainly by the gas supply pipe 251, the MFC 253, the valve 254 and the nozzle 255. The reactive gas supplier 250 may further include the reactive gas supply source 252.

Subsequently, the inert gas supplier (which is an inert gas supply system) 270 will be described with reference to FIGS. 2 and 4C. A downstream end of an inert gas supply pipe 271 is connected to the inert gas supply pipe 275. An inert gas supply source 272, an MFC 273 and a valve 274 are provided at the inert gas supply pipe 271 in the sequential order from an upstream side to a downstream side of the inert gas supply pipe 271. The inert gas is supplied into the space 284 and the vessel 204 through the inert gas supply pipe 275 via the inert gas supply pipe 271 provided with the MFC 273 and the valve 274.

The inert gas supplied into the vessel 204 is exhausted through the exhaust groove 288 via a space between the rotary table 217 and the window 285. With such a structure, it is possible to prevent the source gas and the reactive gas from flowing into the space between the rotary table 217 and the window 285.

The inert gas supplier 270 is constituted mainly by the inert gas supply pipe 271, the MFC 273, the valve 274 and the inert gas supply pipe 275. The inert gas supplier 270 may further include the inert gas supply source 272.

In the present specification, the inert gas may include at least one among nitrogen (N2) gas and a rare gas such as helium (He) gas, neon (Ne) gas and argon (Ar) gas. Specifically, according to the embodiments, for example, the N2 gas may be used as the inert gas.

As shown in FIGS. 1 and 2 , the exhaust port 291 and the exhaust port 292 are provided at the process vessel 203.

The exhaust port 291 is provided outside the rotary table 217 at a rotationally downstream side of the first process region 206 a in the rotation direction “R”. Thus, by exhausting (discharging) the source gas thermally decomposed and supplied to the substrate S through the first process region 206 a, it is possible to suppress the influence of the thermally decomposed source gas on the substrate S. The source gas is mainly exhausted through the exhaust port 291. An exhaust pipe 234 a which is a part of an exhauster (also referred to as an “exhaust system”) 234 is provided so as to communicate with the exhaust port 291. A vacuum pump 234 b serving as a vacuum exhaust device is connected to the exhaust pipe 234 a via a valve 234 d serving as an opening/closing valve and an APC (Automatic Pressure Controller) valve 234 c serving as a pressure controller (also referred to as a “pressure regulator”). The vacuum pump 234 b is configured to vacuum-exhaust an inner atmosphere of the process chamber 201 such that an inner pressure of the process chamber 201 reaches a predetermined pressure (vacuum degree).

The exhaust pipe 234 a, the valve 234 d and the APC valve 234 c are collectively referred to as the exhauster 234. The exhauster 234 may further include the vacuum pump 234 b.

As shown in FIGS. 1 and 2 , an exhauster 235 is provided so as to communicate with the exhaust port 292. The exhaust port 292 is provided outside the rotary table 217 at a rotationally downstream side of the second process region 206 b in the rotation direction “R”. The reactive gas is mainly exhausted through the exhaust port 292.

An exhaust pipe 235 a which is a part of the exhauster 235 is provided so as to communicate with the exhaust port 292. A vacuum pump 235 b is connected to the exhaust pipe 235 a via a valve 235 d and an APC valve 235 c. The vacuum pump 235 b is configured to vacuum-exhaust the inner atmosphere of the process chamber 201 such that the inner pressure of the process chamber 201 reaches a predetermined pressure (vacuum degree).

The exhaust pipe 235 a, the valve 235 d and the APC valve 235 c are collectively referred to as the exhauster 235. The exhauster 235 may further include the vacuum pump 235 b.

Subsequently, the purge regions 207 a and 207 b will be described in detail with reference to FIGS. 1 and 5 . Since a configuration of the purge region 207 b is the same as that of the purge region 207 a, only the purge region 207 a will be described in detail and the description of the purge region 207 b is omitted. FIG. 5 schematically illustrates a cross-section taken along the line B-B′ of the reactor 200 of the substrate processing apparatus shown in FIG. 1 . That is, FIG. 5 schematically illustrates the cross-section when viewed from the “C” direction shown in FIG. 2 .

The purge region 207 a is divided into three regions, that is, a first region 207 a-1, a second region 207 a-2 and a third region 207 a-3 in this order, from a rotationally upstream side to a rotationally downstream side along the rotation direction “R” of the rotary table 217. The rotation direction “R” of the rotary table 217 is also referred to as a transfer direction of the substrate S. The first region 207 a-1 is used as a first pressure purge region purged at a first pressure, the second region 207 a-2 is used as a second pressure purge region purged at a second pressure, and the third region 207 a-3 is used as a third pressure purge region purged at a third pressure. The first and third pressures are higher than the second pressure.

The ceiling 208 a is provided at the purge region 207 a so as to face the rotary table 217. A height of the ceiling 208 a corresponding to the first region 207 a-1, a height of the ceiling 208 a corresponding to the second region 207 a-2 and a height of the ceiling 208 a corresponding to the third region 207 a-3 are all different from one another. The ceiling 208 a is connected to the lower surface of the top plate 209 of the process vessel 203 constituting the process chamber 201.

A partition 402 configured to separate the first process region 206 a and the first region 207 a-1 is provided between the first process region 206 a and the first region 207 a-1. A partition 403 configured to separate the first region 207 a-1 and the second region 207 a-2 is provided between the first region 207 a-1 and the second region 207 a-2. A partition 404 configured to separate the second region 207 a-2 and the third region 207 a-3 is provided between the second region 207 a-2 and the third region 207 a-3. A partition 405 configured to separate the third region 207 a-3 and the second process region 206 b is provided between the third region 207 a-3 and the second process region 206 b. Each of the partitions 402 through 405 serves as a part of the ceiling 208 a. The partitions 402 through 405 are connected continuously with the ceiling 208 a. Heights of the partitions 402 through 405 (that is, distances from un upper surface of the rotary table 217 to a lower end of each partition 402 through 405) are set such that the substrate S can be placed on one of the concave portions 217 b by passing through a space defined by the rotary table 217 and the partitions 402 through 405. For example, the heights of the partitions 402 through 405 may range from 3 mm to 5 mm, respectively.

The height of the ceiling 208 a corresponding to the first region 207 a-1 (that is, the distance from the upper surface of the rotary table 217 to a lower surface of the ceiling 208 a corresponding to the first region 207 a-1) is lower than the height of the ceiling corresponding to the first process region 206 a (that is, the distance from the upper surface of the rotary table 217 to the lower surface of the top plate 209). The height of the ceiling 208 a corresponding to the second region 207 a-2 is lower than the height of the ceiling corresponding to the first region 207 a-1, and is equal to or higher than a lower end of the partition 403. In addition, the height of the ceiling 208 a corresponding to the second region 207 a-2 is lower than the height of the ceiling 208 a corresponding to the third region 207 a-3, and is equal to or higher than a lower end of the partition 404. The height of the ceiling 208 a corresponding to the third region 207 a-3 is higher than the height of the ceiling corresponding to the second process region 206 b. According to the embodiments, for example, the height of the ceiling 208 a corresponding to the first region 207 a-1 is the same as the height of the ceiling 208 a corresponding to the third region 207 a-3.

Exhaust passages 401 a-1, 401 a-2 and 401 a-3 communicating with the first region 207 a-1, the second region 207 a-2 and the third region 207 a-3, respectively, are provided in the ceiling 208 a and the top plate 209. The exhaust passages 401 a-1, 401 a-2 and 401 a-3 are connected to exhaust pipes 236 a, 236 b and 236 c, respectively. The exhaust pipes 236 a, 236 b and 236 c are connected to an exhaust pipe 236 d via valves 236 e, 236 f and 236 g, respectively. The exhaust pipe 236 d is connected to a vacuum pump 236 j serving as a vacuum exhaust device. A branch passage 236 h is connected to the exhaust pipe 236 b at an upstream side of the valve 236 f. The branch passage 236 h is connected to the vacuum pump 236 j via a valve 236 i, an auxiliary pump 236 k and the exhaust pipe 236 d. For example, an air valve, an APC valve or both of the air valve and the APC valve may be used as the valves 236 e, 236 f, 236 g and 236 i. The first region 207 a-1, the second region 207 a-2 and the third region 207 a-3 may be exhausted such that an inner pressure of each of the first region 207 a-1, the second region 207 a-2 and the third region 207 a-3 reaches a predetermined pressure (vacuum degree).

For example, an inner diameter (also simply referred to as a “diameter”) of the exhaust pipe 236 b connected to the exhaust passage 401 a-2 of the second region 207 a-2 is greater than those of the exhaust pipes 236 a and 236 c. The exhaust pipes 236 a and 236 c are connected to the exhaust passage 401 a-1 of the first region 207 a-1 and the exhaust passage 401 a-3 of the third region 207 a-3, respectively.

That is, the gas in the first region 207 a-1, the second region 207 a-2 and the third region 207 a-3 is exhausted through upper portions of the first region 207 a-1, the second region 207 a-2 and the third region 207 a-3. In addition, the inner pressure of the second region 207 a-2 is further reduced than those of the first region 207 a-1 and the third region 207 a-3 using the auxiliary pump 236 k. As a result, the gas in the second region 207 a-2 is exhausted while the vacuum degree of the second region 207 a-2 is increased.

The exhaust pipes 236 a through 236 d, the valves 236 e through 236 g, the branch passage 236 h and the valve 236 i are collectively referred to as an exhauster (also referred to as an “exhaust system”) 236. The exhauster 236 may further include the vacuum pump 236 j and the auxiliary pump 236 k.

Similarly, exhaust pipes 237 a through 237 d, valves 237 e to 237 g, branch passage 237 h and a valve 237 i connected to the respective regions in the purge region 207 b are collectively referred to as an exhauster 237. The exhauster 237 may further include a vacuum pump 237 j and an auxiliary pump 237 k.

According to the embodiments, for example, by decreasing (lowering) the height of the ceiling 208 a corresponding to the first region 207 a-1 than the height of the ceiling 208 a corresponding to the first process region 206 a, the inner pressure of the first region 207 a-1 is set lower than an inner pressure of the first process region 206 a. By decreasing the height of the ceiling 208 a corresponding to the second region 207 a-2 than the height of the ceiling 208 a corresponding to the first region 207 a-1, the inner pressure of the second region 207 a-2 is set lower than the inner pressure of the first region 207 a-1. By increasing the height of the ceiling 208 a corresponding to the third region 207 a-3 than the height of the ceiling 208 a corresponding to the second region 207 a-2, the inner pressure of the third region 207 a-3 is set higher than the inner pressure of the second region 207 a-2. By increasing the height of the ceiling corresponding to the second process region 206 b than the height of the ceiling 208 a corresponding to the third region 207 a-3, an inner pressure of the second process region 206 b is set higher than the inner pressure of the third region 207 a-3.

As described above, in the purge region 207 a, the inner pressure of the first region 207 a-1 is set lower than the inner pressure of the first process region 206 a, the inner pressure of the second region 207 a-2 is set lower than the inner pressure of the first region 207 a-1 (that is, the vacuum degree of the second region 207 a-2 is at a high vacuum state), and the inner pressure of the third region 207 a-3 is set higher than the inner pressure of the second region 207 a-2. By purging and vacuum-exhausting the first region 207 a-1, the second region 207 a-2 and the third region 207 a-3 with the inner pressures set as described above, it is possible to alternately apply a pressure difference to the substrates S transferred in the purge region 207 a. As a result, it is possible to remove the unreacted gas and by-products on the substrate S.

For example, a moving distance L2 of the substrate S in the second region 207 a-2 is longer than a moving distance L1 of the substrate S in the first region 207 a-1 and a moving distance L3 of the substrate S in third region 207 a-3. By increasing (lengthening) the moving distance of the substrate S in the second region 207 a-2 where the pressure is lower than other regions of the purge region 207 a (that is, where the vacuum degree is higher than other regions of the purge region 207 a), it is possible to more effectively remove the unreacted gas and by-products on the substrate S.

In addition, a purge gas supplier (also referred to as a “purge gas supply part” or a “purge gas supply system”) (not shown) may be further provided in the first region 207 a-1 and the third region 207 a-3. The purge gas supplier is configured to supply the purge gas such as N2 gas. The first region 207 a-1 and the third region 207 a-3 may be exhausted (vacuum-exhausted) while supplying the purge gas through the purge gas supplier.

In addition, the first region 207 a-1 may not be provided. For example, the purge region 207 a may be divided into two regions, that is, the second region 207 a-2 and the third region 207 a-3 in this order, from the rotationally upstream side to the rotationally downstream side along the rotation direction “R” of the rotary table 217 (also referred to as the transfer direction of the substrate S). The second region 207 a-2 is used as the first pressure purge region to be purged at the first pressure, and the third region 207 a-3 is used as the second pressure purge region to be purged at the second pressure higher than the first pressure.

The reactor 200 includes the controller 300 configured to control the operations of the components of the substrate processing apparatus. As shown in FIG. 6 , the controller 300 includes at least a CPU (Central Processing Unit) 301 serving as an arithmetic unit, a RAM (Random Access Memory) 302 serving as a temporary memory (also simply referred to as a “temporary memory device”), a memory (also simply referred to as a “memory device”) 303 and a transmitter/receiver (also referred to as a “transmission/reception part”) 304. The controller 300 is connected to the components of the substrate processing apparatus via the transmitter/receiver 304, calls a program or a recipe from the memory 303 in accordance with an instruction from a host controller or a user, and controls the operations of the components of the substrate processing apparatus according to the contents of the instruction. The controller 300 may be embodied by a dedicated computer or by a general-purpose computer. According to the embodiments, for example, the controller 300 may be embodied by preparing an external memory (also simply referred to as an “external memory device”) 312 storing the program and by installing the program onto the general-purpose computer using the external memory 312. For example, the external memory 312 may include a magnetic tape, a magnetic disk such as a flexible disk and a hard disk, an optical disk such as a CD and a DVD, a magneto-optical disk such as an MO and a semiconductor memory such as a USB memory (USB flash drive) and a memory card. The means for providing the program to the computer is not limited to the external memory 312. For example, the program may be supplied to the computer (general-purpose computer) using communication means such as the Internet and a dedicated line. The program may be provided to the computer without using the external memory 312 by receiving the information (that is, the program) from a host apparatus 320 via a transmitter/receiver (also referred to as a “transmission/reception part”) 311. In addition, a user can input an instruction to the controller 300 using an input/output device 313 such as a keyboard and a touch panel.

The memory 303 or the external memory 312 may be embodied by a non-transitory computer readable recording medium. Hereafter, the memory 303 and the external memory 312 may be collectively referred to as the recording medium. In the present specification, the term “recording medium” may refer to only the memory 303, may refer to only the external memory 312 or may refer to both of the memory 303 and the external memory 312.

The CPU 301 is configured to read a control program from the memory 303 and execute the read control program. Furthermore, the CPU 301 is configured to read the recipe such as a process recipe from the memory 303 according to an operation command inputted from the input/output device 313. According to the contents of the read recipe, the CPU 301 may be configured to control the operations of the components of the substrate processing apparatus.

(2) SUBSTRATE PROCESSING

Subsequently, the substrate processing according to the embodiments will be described with reference to FIGS. 7 and 8 . FIG. 7 is a flow chart schematically illustrating the substrate processing according to the embodiments described herein. FIG. 8 is a flow chart schematically illustrating a film-forming step of the substrate processing according to the embodiments described herein. In the following description, the operations of the components of the substrate processing apparatus (and the reactor 200) are controlled by the controller 300.

The substrate processing according to the embodiments will be described by way of an example in which a silicon nitride (SiN) film serving as the film is formed on the substrate S by using the Si2H2Cl2 gas as the source gas and the NH3 gas as the reactive gas.

A substrate loading and placing step S110 will be described. In the reactor 200, the pins 219 are elevated such that the pins 219 pass through the through-holes 217 a of the rotary table 217. As a result, the pins 219 protrude from the surface of the rotary table 217 by a predetermined height. Subsequently, the gate valve 205 is opened, and the substrate S is placed on the pins 219 as shown in FIG. 3 by using a substrate transfer device (not shown). After the substrate S is placed on the pins 219, by lowering the pins 219, the substrate S is placed on one of the concave portions 217 b.

The rotary table 217 is rotated until one of the concave portions 217 b, where the substrate S is not placed, faces the gate valve 205. Thereafter, one of the substrates is placed on the above-mentioned one of the concave portions 217 b. An operation described above is repeated until the plurality of the substrates including the substrate S are placed on all of the concave portions 217 b.

After the plurality of the substrates including the substrate S are placed on all of the concave portions 217 b, the substrate transfer device is retracted out of the reactor 200, and the gate valve 205 is closed to seal the process vessel 203.

When the plurality of the substrates including the substrate S are loaded into the process chamber 201, it is preferable to purge the purge regions 207 a and 207 b while exhausting the process chamber 201 by the exhausters 234 and 235. Thereby, it is possible to suppress the particles from entering the process chamber 201 and from adhering onto the plurality of the substrates including the substrate S. The vacuum pumps 234 b, 235 b, 236 j and 237 j and the auxiliary pumps 236 k and 237 k may be continuously operated from the substrate loading and placing step S110 until at least a substrate unloading step S170 described later is completed.

When the substrate S is placed on the rotary table 217, the electric power is supplied to the heater 280 in advance such that a temperature (surface temperature) of the substrate S is adjusted to a predetermined temperature. For example, the predetermined temperature of the substrate S according to the embodiments may range from the room temperature to 650° C., preferably from the room temperature to 400° C. The electric power may be continuously supplied to the heater 280 from the substrate loading and placing step S110 until at least the substrate unloading step S170 described later is completed.

In the substrate loading and placing step S110, the inert gas is supplied to the process vessel 203 and the heater mechanism 281 through the inert gas supplier 270. The inert gas may be continuously supplied through the second inert gas supplier 270 from the substrate loading and placing step S110 until at least the substrate unloading step S170 described later is completed.

A step S120 of starting the rotation of the rotary table 217 will be described. After the plurality of the substrates including the substrate S are placed on all of the concave portions 217 b, the controller 300 controls the rotator 224 to rotate the rotary table 217 in the “R” direction shown in FIG. 1 . By rotating the rotary table 217, the substrate S is moved to the first process region 206 a, the first purge region 207 a, the second process region 206 b and the second purge region 207 b sequentially in this order.

A step S130 of starting the supply of the gas will be described. When the substrate S is heated to a desired temperature and the rotary table 217 reaches a desired rotation speed, the valve 244 is opened to start the supply of the Si2H2Cl2 gas into the first process region 206 a. In parallel with the supply of the Si2H2Cl2 gas, the valve 254 is opened to supply the NH3 gas into the second process region 206 b.

In the step S130, a flow rate of the Si2H2Cl2 gas is adjusted by the MFC 243 to a predetermined flow rate. For example, the predetermined flow rate of the Si2H2Cl2 gas in the step S130 may range from 50 sccm to 500 sccm.

In the step S130, a flow rate of the NH3 gas is adjusted by the MFC 253 to a predetermined flow rate. For example, the predetermined flow rate of the NH3 gas in the step S130 may range from 100 sccm to 5,000 sccm.

In addition, after the substrate loading and placing step S110, the process chamber 201 is exhausted by the exhausters 234 and 235, and the first purge region 207 a and the second purge region 207 b are purged. In addition, by appropriately adjusting valve opening degrees of the APC valve 234 c and the APC valve 235 c, the inner pressure of the process chamber 201 is adjusted to a predetermined pressure.

A film-forming step S140 will be described. Here, a basic flow of the film-forming step S140 will be described, and the film-forming step S140 will be described in detail later. In the film-forming step S140, a silicon-containing layer is formed on the substrate S in the first process region 206 a. After the substrate S is rotated to the second process region 206 b, by reacting the silicon-containing layer with the NH3 gas in the second process region 206 b, a silicon nitride (SiN) film is formed on the substrate S. The rotary table 217 is rotated a predetermined number of times so that the SiN film of a desired thickness is obtained.

A step S150 of stopping the supply of the gas will be described. After the rotary table 217 is rotated the predetermined number of times, the valve 244 is closed to stop the supply of the Si2H2Cl2 gas to the first process region 206 a and the valve 254 is closed to stop the supply of the NH3 gas to the second process region 206 b.

A step S160 of stopping the rotation of the rotary table 217 will be described. After the supply of the Si2H2Cl2 gas and the supply of the NH3 gas are stopped according to the step S150, the rotation of the rotary table 217 is stopped in the step S160.

The substrate unloading step S170 will be described. The rotary table 217 is rotated to move the substrate S to the position facing the gate valve 205. Thereafter, the substrate S is supported on the pins 219 in the same manner as when the substrate S is loaded. After the substrate S is supported on the pins 219, the gate valve 205 is opened, and the substrate S is unloaded (transferred) out of the process vessel 203 using the substrate transfer device (not shown). An operation described above is repeated until all of the plurality of the substrates are unloaded out of the process vessel 203. After all of the plurality of the substrates are unloaded, the supply of the inert gas by the inert gas supplier 270 is stopped.

Subsequently, the film-forming step S140 will be described in detail with reference to FIG. 8 . The film-forming step S140 will be mainly described based on the substrate S among the plurality of the substrates placed on the rotary table 217 from a first process region passing step S210 to a second purge region passing step S240.

As shown in FIG. 8 , during the film-forming step S140, the plurality of the substrates including the substrate S pass through the first process region 206 a, the first purge region 207 a, the second process region 206 b and the second purge region 207 b sequentially in this order as the rotary table 217 is rotated.

The first process region passing step S210 will be described. As the substrate S passes through the first process region 206 a, the Si2H2Cl2 gas is supplied to the substrate S. When the substrate S passes through the first process region 206 a, since there is no reactive gas in the first process region 206 a, the Si2H2Cl2 gas directly contacts (adheres) to the surface of the substrate S without reacting with the reactive gas. Thereby, the first layer is formed on the surface of the substrate S.

Subsequently, a first purge region passing step S220 will be described. After passing through the first process region 206 a, the substrate S moves to the first region 207 a-1 of the purge region 207 a. By vacuum-exhausting the first region 207 a-1 at a pressure lower than that of the first process region 206 a, components of the Si2H2Cl2 gas which are not strongly adhered to the substrate S in the first process region 206 a are removed from the substrate S.

Then, after passing through the first region 207 a-1, the substrate S moves to the second region 207 a-2. By vacuum-exhausting the second region 207 a-2 at a pressure lower than that of the first region 207 a-1, the by-products which are adhered onto the substrate S and are not completely removed from the first region 207 a-1 are removed from the substrate S.

Then, after passing through the second region 207 a-2, the substrate S moves to the third region 207 a-3. By vacuum-exhausting the third region 207 a-3 at a pressure higher than that of the second region 207 a-2, the by-products which are adhered onto the substrate S and are not completely removed from the second region 207 a-2 are removed from the substrate S.

That is, in the purge region 207 a, by transferring the substrate S through a plurality of regions of different pressures (different vacuum degrees), it is possible to remove the by-products in a groove of a high aspect ratio, and to suppress the generation of the particles.

A second process region passing step S230 will be described. After passing through the first purge region 207 a, the substrate S moves to the second process region 206 b. When the substrate S passes through the second process region 206 b, the first layer reacts with the NH3 gas serving as the reactive gas in the second process region 206 b. Thereby, a second layer containing at least silicon (Si) and nitrogen (N) is formed on the substrate S.

Subsequently, the second purge region passing step S240 will be described. After passing through the second process region 206 b, similar to the first purge region passing step S220, the substrate S passes through a first region, a second region and a third region of the purge region 207 b. That is, the substrate S passes through a plurality of regions of different pressures (different vacuum degrees) in the purge region 207 b. When the substrate S passes through each region of the purge region 207 b, substances such as HCl desorbed from the second layer on the substrate S in the second process region 206 b and surplus H2 gas are removed from the substrate S.

As described above, at least two gases reacting with each other are sequentially supplied to the substrate S. A cycle of the embodiments includes the first process region passing step S210, the first purge region passing step S220, the second process region passing step S230 and the second purge region passing step S240.

A determination step S250 will be described. In the determination step S250, the controller 300 determines whether the cycle including the first process region passing step S210, the first purge region passing step S220, the second process region passing step S230 and the second purge region passing step S240 has been performed a predetermined number of times. Specifically, the controller 300 counts the number of the rotation of the rotary table 217.

When the cycle has not been performed the predetermined number of times (“NO” in the step S250 of FIG. 8 ), the rotary table 217 is rotated and the cycle including the first process region passing step S210, the first purge region passing step S220, the second process region passing step S230 and the second purge region passing step S240 is repeated. By performing the cycle the predetermined number of times, it is possible to form the film on the substrate S.

When the cycle has been performed the predetermined number of times (“YES” in the step S250 of FIG. 8 ), the film-forming step S140 is terminated. As described above, it is possible to form the film on the substrate S with a predetermined thickness by performing the cycle the predetermined number of times

(3) EFFECTS ACCORDING TO EMBODIMENTS

According to the embodiments described above, it is possible to provide at least one or more of the following effects.

(a) It is possible to suppress the generation of the particles by removing the by-products on the substrate.

(b) By transferring the substrate S through the plurality of the regions of different pressures (different vacuum degrees), it is possible to remove the by-products in the groove of a high aspect ratio, and to suppress the generation of the particles.

(c) By increasing the moving distance of the substrate S in a low pressure (high vacuum) region of the purge region where the pressure is lower than other regions of the purge region (the vacuum degree is higher than other regions of the purge region), it is possible to more effectively remove the by-products on the substrate S.

(d) By setting the inner diameter of the exhaust pipe connected to the exhaust passage communicating with the low pressure (high vacuum) region of the purge region greater than the inner diameters of the exhaust pipes connected to the exhaust passages communicating with other regions of the purge region and by easily vacuum-exhausting the low pressure (high vacuum) region of the purge region, it is possible to easily discharge the by-products on the substrate S.

(e) By providing the auxiliary pump at the exhaust pipe connected to the exhaust passage communicating with the low pressure (high vacuum) region of the purge region and by easily vacuum-exhausting the low pressure (high vacuum) region of the purge region, it is possible to easily discharge the by-products on the substrate S as compared with a case where only a vacuum pump is provided.

(4) MODIFIED EXAMPLES

While the embodiments are described in detail, the above-described technique is not limited thereto. For example, features such as the shape of the ceiling constituting the purge regions 207 a and 207 b are not limited to the embodiments described above. For example, the features may be modified as in the following examples. Hereinafter, the following examples will be mainly described based on the differences between the embodiments and the following examples. According to the following examples, it is possible to obtain the same effects as those of the embodiments.

First Modified Example

FIG. 9 schematically illustrates a modified example of a vertical cross-section taken along the line B-B′ of the reactor 200 of the substrate processing apparatus shown in FIG. 1 . According to a first modified example shown in FIG. 9 , the second region is different from the second region of each of the purge regions 207 a and 207 b. The first modified example will be described based on the purge region 207 a.

According to the first modified example, the partition 403 configured to separate the first region 207 a-1 and the second region 207 a-2 according to the embodiments and the partition 404 configured to separate the second region 207 a-2 and the third region 207 a-3 according to the embodiments are not provided. For example, according to the first modified example, the height of the ceiling 208 a corresponding to the second region 207 a-2 is equal to the lower end of the partition 403 and the lower end of the partition 404. In addition, for example, according to the first modified example, the height of an upper surface of the top plate 209 in the second region 207 a-2 (that is, the distance from the upper surface of the rotary table 217 to the upper surface of the top plate 209 in the second region 207 a-2) is lower than the height of the upper surface of the top plate 209 in the first region 207 a-1 (that is, the distance from the upper surface of the rotary table 217 to the upper surface of the top plate 209 in the first region 207 a-1) and the height of the upper surface of the top plate 209 in the third region 207 a-3 (that is, the distance from the upper surface of the rotary table 217 to the upper surface of the top plate 209 in the third region 207 a-3).

As described above, by lowering the height of the upper surface of the top plate 209 in the second region 207 a-2 as compared with the heights of the upper surfaces of the top plate 209 in other regions, it is possible to shorten the length of the exhaust passage 401 a-2 communicating with the second region 207 a-2 such that the second region 207 a-2 is easily vacuum-exhausted. That is, by shortening the length of the exhaust passage communicating with the low pressure (high vacuum) region of the purge region and by easily vacuum-exhausting the low pressure (high vacuum) region of the purge region, it is possible to easily discharge the by-products on the substrate S.

Second Modified Example

FIG. 10 schematically illustrates another modified example of a vertical cross-section taken along the line B-B′ of the reactor 200 of the substrate processing apparatus shown in FIG. 1 . According to a second modified example shown in FIG. 10 , the purge regions 207 a and 207 b are divided into four regions, respectively. The second modified example will be described based on the purge region 207 a.

According to the second modified example, the purge region 207 a is divided into four regions, that is, a first region 407 a-1, a second region 407 a-2, a third region 407 a-3 and a fourth region 407 a-4 in this order, from the rotationally upstream side to the rotationally downstream side along the rotation direction “R” of the rotary table 217 (also referred to as the transfer direction of the substrate S). According to the second modified example, the third region 407 a-3 is to be purged at a first pressure. The second region 407 a-2 and the fourth region 407 a-4 are to be purged at a second pressure higher than the first pressure. The first region 407 a-1 is to be purged at a third pressure.

A partition 502 configured to separate the first process region 206 a and the first region 407 a-1 is provided between the first process region 206 a and the first region 407 a-1. A partition 503 configured to separate the first region 407 a-1 and the second region 407 a-2 is provided between the first region 407 a-1 and the second region 407 a-2. A partition 504 configured to separate the second region 407 a-2 and the third region 407 a-3 is provided between the second region 407 a-2 and the third region 407 a-3. A partition 505 configured to separate the third region 407 a-3 and the fourth region 407 a-4 is provided between the third region 407 a-3 and the fourth region 407 a-4. A partition 506 configured to separate the fourth region 407 a-4 and the second process region 206 b is provided between the fourth region 407 a-4 and the second process region 206 b. Each of the partitions 502 through 506 serves as a part of the ceiling 208 a. Each of the partitions 502 through 506 serves as a part of the ceiling 208 a. The partitions 502 through 506 are connected continuously with the ceiling 208 a.

Exhaust passages 507 a-1, 507 a-2, 507 a-3 and 507 a-4 communicating with the first region 407 a-1, the second region 407 a-2, the third region 407 a-3 and the fourth region 407 a-4, respectively, are provided in the ceiling 208 a and the top plate 209. The exhaust passages 507 a-1, 507 a-2, 507 a-3 and 507 a-4 are connected to a vacuum pump (or vacuum pumps) via exhaust pipes, respectively. The first region 407 a-1, the second region 407 a-2, the third region 407 a-3 and the fourth region 407 a-4 may be exhausted such that an inner pressure of each of the first region 407 a-1, the second region 407 a-2, the third region 407 a-3 and the fourth region 407 a-4 reaches a predetermined pressure (vacuum degree).

Supply passages 501 a-1, 501 a-2 and 501 a-3 communicating with the first region 407 a-1, the second region 407 a-2 and the fourth region 407 a-4, respectively, are provided in the ceiling 208 a and the top plate 209. A purge gas supplier (which is a purge gas supply system) (not shown) configured to supply the purge gas is connected to each of the supply passages 501 a-1, 501 a-2 and 501 a-3 via valves (not shown). For example, the purge gas supplier is fixed to the ceiling 208 a. According to the second modified example, an inert gas such as the N2 gas is used as the purge gas.

According to the second modified example, two regions (that is, the second region 407 a-2 where the pressure is higher than that of the third region 407 a-3 and the first region 407 a-1 where the pressure is higher than that of the second region 407 a-2) are provided at a rotationally upstream side of the third region 407 a-3 along the transfer direction of the substrate S. The third region 407 a-3 serves as the low pressure (high vacuum) region of the purge region 207 a. The height of the ceiling 208 a corresponding to the first region 407 a-1 is equal to the height of the ceiling 208 a corresponding to the second region 407 a-2. However, since the first region 407 a-1 is adjacent to the first process region 206 a, an inner pressure of the second region 407 a-2 is lower than an inner pressure of the first region 407 a-1. That is, the inner pressure of the first region 407 a-1 is lower than the inner pressure of the first process region 206 a, and higher than the inner pressure of the second region 407 a-2.

According to the second modified example, the first region 407 a-1, the second region 407 a-2 and the fourth region 407 a-4 are vacuum-exhausted while supplying the purge gas into each of the first region 407 a-1, the second region 407 a-2 and the fourth region 407 a-4. Therefore, the N2 gas flows at high speed in the space between the partition 503 and the rotary table 217. That is, a high flow velocity region is provided by partitioning a high pressure region and a low pressure region. Then, it is possible to discharge gas molecules in the groove of a high aspect ratio on the substrate S by a high speed flow of the N2 gas below the partition 503.

The controller 300 controls one or both of an exhaust amount in the second region 407 a-2 and the first region 407 a-1 and a supply flow rate (supply amount) of the purge gas by the purge gas supplier such that the inner pressure of the first region 407 a-1 is lower than the inner pressure of the first process region 206 a and higher than the inner pressure of the second region 407 a-2. As a result, it is possible to form a high speed flow of the N2 gas below the partition 503, and to discharge the gas molecules in the groove on the substrate S, particularly, the groove of a high aspect ratio. That is, in the purge regions 207 a and 207 b, by transferring the substrate S through a plurality of regions of different pressures (different vacuum degrees) while supplying the purge gas, it is possible to remove the by-products in the groove of a high aspect ratio.

While the technique is described in detail by way of the above-described embodiments and the modified examples, the above-described technique is not limited thereto. The above-described technique may be modified in various ways without departing from the gist thereof.

The embodiments of the technique are described based on the film-forming step serving as a part of manufacturing processes of a semiconductor device. However, the technique may be applied to other processes. For example, the technique may be applied to a step of performing a heat treatment process or a plasma treatment process on the substrate for each cycle. By applying the technique, it is possible to efficiently remove the by-products generated in the groove and the gas (molecules) desorbed from the film already formed on the substrate. In addition, the technique is not limited to the processes described above. For example, the technique may be applied to a process of etching each atomic layer (molecular layer) of the film formed on the substrate. By purging an etching gas as described above, it is possible to efficiently remove substances such as the by-products in the groove generated by etching and the etching gas present in the groove.

PREFERRED EMBODIMENTS OF TECHNIQUE

Preferred embodiments of the technique will be supplementarily described below.

Supplementary Note 1

According to one aspect of the technique described herein, there is provided a substrate processing apparatus including: a substrate processing apparatus including:

a process chamber in which a substrate is processed; and

a substrate support provided in the process chamber and including a plurality of supports where the substrate is placed,

wherein the process chamber includes a process region where a process gas is supplied to the substrate and a purge region where the process gas above the substrate is purged, and

the purge region includes a first pressure purge region to be purged at a first pressure and a second pressure purge region to be purged at a second pressure lower than the first pressure.

Supplementary Note 2

The substrate processing apparatus of Supplementary note 1, wherein a ceiling facing the substrate, and a partition connected continuously with the ceiling and configured to separate the first pressure purge region from the second pressure purge region are provided in the purge region, and

a height of the ceiling corresponding to the second pressure purge region is lower than a height of the ceiling corresponding to the first pressure purge region, and is equal to or higher than a lower end of the partition.

Supplementary Note 3

The substrate processing apparatus of Supplementary note 1 or Supplementary note 2, wherein a diameter of an exhaust pipe connected to the second pressure purge region is greater than that of an exhaust pipe connected to the first pressure purge region.

Supplementary Note 4

The substrate processing apparatus of Supplementary note 2, wherein the ceiling is constituted by a lower surface of a top plate constituting the process chamber, and a height of an upper surface of the top plate in the second pressure purge region is lower than a height of the upper surface of the top plate in the first pressure purge region.

Supplementary Note 5

The substrate processing apparatus of any one of Supplementary notes 1 through 4, wherein an inner pressure of the first pressure purge region is lower than an inner pressure of the process region.

Supplementary Note 6

The substrate processing apparatus of any one of Supplementary notes 1 through 5, wherein a moving distance of the substrate in the second pressure purge region is longer than a moving distance of the substrate in the first pressure purge region.

Supplementary Note 7

The substrate processing apparatus of any one of Supplementary notes 1 through 6, wherein the purge region further includes a third pressure purge region to be purged at a third pressure, the substrate processing apparatus further including:

a purge gas supplier configured to supply a purge gas to the first pressure purge region and the third pressure purge region; and

a controller configured to control one or both of an exhaust amount in the first pressure purge region and the third pressure purge region and a supply flow rate of the purge gas by the purge gas supplier such that an inner pressure of the third pressure purge region is lower than an inner pressure of the process region and higher than an inner pressure of the second pressure purge region.

Supplementary Note 8

According to still another aspect of the technique described herein, there is provided a method of manufacturing a semiconductor device using a substrate processing apparatus including: a process chamber in which a substrate is processed; and a substrate support provided in the process chamber and including a plurality of supports where the substrate is placed, wherein the process chamber includes a process region where a process gas is supplied to the substrate, a first pressure purge region to be purged at a first pressure and a second pressure purge region to be purged at a second pressure higher than the first pressure, the method including:

(a) supplying the purge gas to the substrate;

(b) purging the substrate at the first pressure; and

(c) purging the substrate at the second pressure,

wherein (c) is performed before or after (b).

According to still another aspect of the technique described herein, there is provided a non-transitory computer-readable recording medium storing a program related to a substrate processing apparatus including: a process chamber in which a substrate is processed; and a substrate support provided in the process chamber and including: a plurality of supports where the substrate is placed, wherein the process chamber includes a process region where a process gas is supplied to the substrate, a first pressure purge region to be purged at a first pressure and a second pressure purge region to be purged at a second pressure higher than the first pressure, wherein the program causes, by a computer, the substrate processing apparatus to perform:

(a) supplying the purge gas to the substrate;

(b) purging the substrate at the first pressure; and

(c) purging the substrate at the second pressure,

wherein (c) is performed before or after (b).

According to some embodiments in the present disclosure, it is possible to suppress the generation of the particles by removing the by-products. 

What is claimed is:
 1. A substrate processing apparatus comprising: a process vessel in which a substrate is processed; and a substrate support provided in the process vessel and comprising a plurality of supports where the substrate is placed, wherein the process vessel comprises a process region where a process gas is supplied to the substrate and a purge region where the process gas above the substrate is purged, and a ceiling of the purge region is located below a ceiling of the process region, wherein the purge region comprises a first region to which a first exhaust pump is connected and whose inner atmosphere is exhausted at a first pressure and a second region to which a second exhaust pump is connected and whose inner atmosphere is exhausted at a second pressure, and wherein the ceiling of the purge region comprises a first ceiling portion provided at the first region to face the substrate support and a second ceiling portion provided at the second region to be adjacent to the first ceiling portion.
 2. The substrate processing apparatus of claim 1, wherein the first ceiling portion and the second ceiling portion are integrated with each other.
 3. The substrate processing apparatus of claim 2, wherein a diameter of an exhaust pipe connected to the second region is greater than that of an exhaust pipe connected to the first region.
 4. The substrate processing apparatus of claim 3, wherein a moving distance of the substrate in the second region is longer than a moving distance of the substrate in the first region.
 5. The substrate processing apparatus of claim 2, wherein a moving distance of the substrate in the second region is longer than a moving distance of the substrate in the first region.
 6. The substrate processing apparatus of claim 2, wherein the purge region further comprises a third region to be exhausted at a third pressure, the substrate processing apparatus further comprising: a purge gas supplier configured to supply a purge gas to the first region and the third region; and a controller configured to control one or both of an exhaust amount in the first region and the third region and a supply flow rate of the purge gas by the purge gas supplier such that an inner pressure of the third region is lower than an inner pressure of the process region and higher than an inner pressure of the second region.
 7. The substrate processing apparatus of claim 1, further comprising a partition extending in a direction toward the substrate support from a boundary between the first ceiling portion and the second ceiling portion to reach a height lower than both of a height of the first ceiling portion and a height of the second ceiling portion.
 8. The substrate processing apparatus of claim 7, wherein a moving distance of the substrate in the second region is longer than a moving distance of the substrate in the first region.
 9. The substrate processing apparatus of claim 7, wherein the purge region further comprises a third region to be exhausted at a third pressure, the substrate processing apparatus further comprising: a purge gas supplier configured to supply a purge gas to the first region and the third region; and a controller configured to control one or both of an exhaust amount in the first region and the third region and a supply flow rate of the purge gas by the purge gas supplier such that an inner pressure of the third region is lower than an inner pressure of the process region and higher than an inner pressure of the second region.
 10. The substrate processing apparatus of claim 1, wherein a diameter of an exhaust pipe connected to the second region is greater than that of an exhaust pipe connected to the first region.
 11. The substrate processing apparatus of claim 10, wherein a moving distance of the substrate in the second region is longer than a moving distance of the substrate in the first region.
 12. The substrate processing apparatus of claim 1, wherein a moving distance of the substrate in the second region is longer than a moving distance of the substrate in the first region.
 13. The substrate processing apparatus of claim 1, wherein the purge region further comprises a third region to be exhausted at a third pressure, the substrate processing apparatus further comprising: a purge gas supplier configured to supply a purge gas to the first region and the third region; and a controller configured to control one or both of an exhaust amount in the first region and the third region and a supply flow rate of the purge gas by the purge gas supplier such that an inner pressure of the third region is lower than an inner pressure of the process region and higher than an inner pressure of the second region.
 14. The substrate processing apparatus of claim 1, wherein an inner pressure of the first region is lower than an inner pressure of the process region.
 15. A substrate processing method to be performed by a substrate processing apparatus, the method comprising: (a) supplying a process gas to a substrate; (b) purging the substrate at a first pressure; and (c) purging the substrate at a second pressure at least before or after (b), wherein the substrate processing apparatus comprises: a process vessel in which a substrate is processed; and a substrate support provided in the process vessel and comprising a plurality of supports where the substrate is placed, wherein the process vessel comprises a process region where the process gas is supplied to the substrate and a purge region where the process gas above the substrate is purged and wherein a ceiling of the purge region is located below a ceiling of the process region, wherein the purge region comprises a first region to which a first exhaust pump is connected and whose inner atmosphere is exhausted at the first pressure; and a second region to which a second exhaust pump is connected and whose inner atmosphere is exhausted at the second pressure, and wherein the ceiling of the purge region comprises a first ceiling portion provided at the first region to face the substrate support and a second ceiling portion provided at the second region to be adjacent to the first ceiling portion.
 16. A method of manufacturing a semiconductor device comprising the substrate processing method of claim
 15. 17. A non-transitory computer-readable recording medium storing a program that causes a substrate processing apparatus to perform: (a) supplying a process gas to a substrate; (b) purging the substrate at a first pressure; and (c) purging the substrate at a second pressure at least before or after (b), wherein the substrate processing apparatus comprises: a process vessel in which a substrate is processed; and a substrate support provided in the process vessel and comprising a plurality of supports where the substrate is placed, wherein the process vessel comprises a process region where the process gas is supplied to the substrate and a purge region where the process gas above the substrate is purged and wherein a ceiling of the purge region is located below a ceiling of the process region, wherein the purge region comprises a first region to which a first exhaust pump is connected and whose inner atmosphere is exhausted at the first pressure; and a second region to which a second exhaust pump is connected and whose inner atmosphere is exhausted at the second pressure, and wherein the ceiling of the purge region comprises a first ceiling portion provided at the first region to face the substrate support and a second ceiling portion provided at the second region to be adjacent to the first ceiling portion. 